TECAPEEK SX natural
PEEK for Semicon applications
TECAPEEK SX natural is an unfilled PEEK plastic material (polyetheretherketone) based on Victrex® PEEK 450, which is processed into sheets, rods and tubes. It meets the requirements of semiconductor copy exactly (also known as copy exact or CE) but is also feasible for many other industries with similar requirements. In addition, more stringent quality controls and measures enable improved internal stress and dimensional stability compared to standard industrial PEEK. As a result, the most demanding machined high-precision parts with the tightest tolerances can be readily realised for semiconductor manufacturing equipment.
The peek material properties, such as excellent wear resistance and very good mechanical properties, even under thermal stress, also apply to TECAPEEK SX natural. Excellent chemical resistance, the high operating peek temperature range (up to 260 °C) complete the peek properties and make TECAPEEK SX natural an almost universally applicable material for highly stressed parts. However, the low ionic impurities that characterise TECAPEEK natural also apply to TECAPEEK SX natural.
With more than 400 different dimensions for TECAPEEK SX available, Ensinger offers the best PEEK plastic size diversity for the semiconductor industries demand.
In this way, machine shops can choose the closest size and save material waste and costs, thus enabling overall part cost reductions. Lot sizes range from just one single piece for prototyping projects, to large industrial size lots. More than 20 different sizes are always available on stock ensuring that even large quantities are always delivered in the shortest possible time or 'just-in-time'. This, together with our highly efficient stock management system, enables highest level of supply security.
As with all Ensinger semiconductor grade materials, we can confirm that TECAPEEK SX natural meets the limitations imposed by RoHS Directive 2011/65/EU Restriction of Hazardous Substances in electrical equipment, and can also provide further conformity declarations on request.
Specifically for CMP retaining rings, Ensinger offers an alternative unfilled PEEK grade: TECAPEEK CMP natural. This PEEK CMP grade offers a special property profile that enables a reduction in wafer defects when used as a CMP retaining ring.